JPS63145610U - - Google Patents
Info
- Publication number
- JPS63145610U JPS63145610U JP3968587U JP3968587U JPS63145610U JP S63145610 U JPS63145610 U JP S63145610U JP 3968587 U JP3968587 U JP 3968587U JP 3968587 U JP3968587 U JP 3968587U JP S63145610 U JPS63145610 U JP S63145610U
- Authority
- JP
- Japan
- Prior art keywords
- break
- view
- break table
- degrees
- intervals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3968587U JPS63145610U (en]) | 1987-03-17 | 1987-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3968587U JPS63145610U (en]) | 1987-03-17 | 1987-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63145610U true JPS63145610U (en]) | 1988-09-26 |
Family
ID=30853086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3968587U Pending JPS63145610U (en]) | 1987-03-17 | 1987-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63145610U (en]) |
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1987
- 1987-03-17 JP JP3968587U patent/JPS63145610U/ja active Pending